•
Capacity (kg)
| Physical | |
|---|---|
| Measurement Volume | |
| XY Accuracy (μm) | 1, 2, 3 |
| Stage Capacity | |
| Exterior Dimensions | |
| Machine Weight | |
| Linear Resolution |
1 Within operating temperature of 20.0℃ ± 1℃ at the focal point position.
2 L is in mm.
3 Using Micro-Vu Calibration Artifact
| Environmental | |
|---|---|
| Operating Temperature | |
| Storage Temperature | |
| Relative Humidity | |
| Sound Level | |
| Max Altitude |
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Products and specifications subject to change without notice.